JPH0221664Y2 - - Google Patents

Info

Publication number
JPH0221664Y2
JPH0221664Y2 JP1984099672U JP9967284U JPH0221664Y2 JP H0221664 Y2 JPH0221664 Y2 JP H0221664Y2 JP 1984099672 U JP1984099672 U JP 1984099672U JP 9967284 U JP9967284 U JP 9967284U JP H0221664 Y2 JPH0221664 Y2 JP H0221664Y2
Authority
JP
Japan
Prior art keywords
valve
nozzle
flapper
piezoelectric element
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984099672U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6116472U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9967284U priority Critical patent/JPS6116472U/ja
Publication of JPS6116472U publication Critical patent/JPS6116472U/ja
Application granted granted Critical
Publication of JPH0221664Y2 publication Critical patent/JPH0221664Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
JP9967284U 1984-07-03 1984-07-03 弁 Granted JPS6116472U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9967284U JPS6116472U (ja) 1984-07-03 1984-07-03 弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9967284U JPS6116472U (ja) 1984-07-03 1984-07-03 弁

Publications (2)

Publication Number Publication Date
JPS6116472U JPS6116472U (ja) 1986-01-30
JPH0221664Y2 true JPH0221664Y2 (en]) 1990-06-11

Family

ID=30659164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9967284U Granted JPS6116472U (ja) 1984-07-03 1984-07-03 弁

Country Status (1)

Country Link
JP (1) JPS6116472U (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63182385U (en]) * 1987-05-15 1988-11-24
JPS6472214A (en) * 1987-09-12 1989-03-17 Smc Corp Vacuum pressure regulator

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE417239B (sv) * 1978-03-17 1981-03-02 Svenska Flaektfabriken Ab Pilotventil for styrning av en pulsventil
JPS5676779A (en) * 1979-11-24 1981-06-24 Matsushita Electric Ind Co Ltd Fluid flow rate control device

Also Published As

Publication number Publication date
JPS6116472U (ja) 1986-01-30

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